Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator

• URL: http://arxiv.org/abs/2606.25753v1
• Date: Wed, 24 Jun 2026 12:22:48 GMT
• Title: Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator
• Abstract summary: A novel framework treats the differentiable waveguide method and the recently proposed waveguide neural operator(WGNO) as end-to-end physics engines.<n>Experiments on realistic 2D and 3D absorbers of the mask show that the considered ILT methods make it possible to obtain a mask structure that achieves the desired field on the wafer.
• Score: 0.0
• License: http://creativecommons.org/licenses/by/4.0/
• Abstract: Gradient-based inverse lithography technology~(ILT) for extreme ultraviolet~(EUV) masks is presented. A novel framework treats the differentiable waveguide method and the recently proposed waveguide neural operator~(WGNO) as end-to-end physics engines, recovering the permittivity of the absorber of the mask through automatic differentiation of the full forward diffraction model. Numerical experiments on realistic 2D and 3D absorbers of the mask (TaBN, La, U) at $λ{=}11.2$~nm show that the considered ILT methods make it possible to obtain a mask structure that achieves the desired field on the wafer.

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