A Two-Mirror Faceted Projection System for EUV Lithography

• URL: http://arxiv.org/abs/2609.11299v1
• Date: Thu, 10 Sep 2026 09:28:02 GMT
• Title: A Two-Mirror Faceted Projection System for EUV Lithography
• Abstract summary: We propose an all-reflective two-mirror projection system for extreme ultraviolet (EUV) lithography operating at exposure wavelengths of $13.5$nm (Mo/Si) and $11.2$nm (Ru/Be)<n>The proposed design redirects each accepted discrete spatial diffraction order scattered by the mask onto the wafer via a dedicated pair of planar mirror facets.
• Score: 0.0
• License: http://creativecommons.org/licenses/by/4.0/
• Abstract: We propose an all-reflective two-mirror projection system for extreme ultraviolet (EUV) lithography operating at exposure wavelengths of $13.5$~nm (Mo/Si) and $11.2$~nm (Ru/Be), delivering a fourfold ($4\times$) demagnification of the periodic mask pattern at a numerical aperture approaching unity ($\mathrm{NA}_{\max} \approx 0.993$). In contrast to conventional EUV projection objectives that incorporate 6--10 aspheric mirrors with an overall optical throughput of less than $15\%$, the proposed design redirects each accepted discrete spatial diffraction order scattered by the mask onto the wafer via a dedicated pair of planar mirror facets. The number of reflections is strictly fixed at two for all accepted orders, retaining $50$--$60\%$ of the power leaving the mask in each accepted order. We derive a spatial geometry providing rigorous optical path length equalization across all diffraction orders, thereby removing order-dependent propagation phase shifts. Individually optimized 30-bilayer Bragg multilayer coatings are designed for each facet using the transfer matrix method combined with global evolutionary optimization algorithms. The architecture is generalized to a three-dimensional vector formulation with a two-dimensionally periodic mask. Utilizing inverse lithography technology, Fourier parameterization, and a differentiable electromagnetic modal waveguide solver, we solve the synthesis problem for binary absorber masks (La absorber on a Ru/Be/Sr multilayer mirror). We demonstrate simulated aerial images of sub-10-nm features on the wafer (isolated peaks with a full width at half maximum (FWHM) of approximately $5.4$~nm and line pairs with a critical dimension of $6$~nm) and find that the two peaks remain resolved for the tested wafer defocus values from $0$ to $5$~nm along the $z$-axis.

Related papers

• $\ ext{GSF-}χ$: Global Stereochemical Fields for Chiral Graph Transformers [49.85093436361195]
  We introduce GSF-$$, a graph transformer in which stereogenic units modulate all pairwise interactions.<n>A $C$ projection separates mirror-even ECD peak counts and positions from mirror-odd peak signs.<n>GSF-$$ leads every central-ECD output and improves axial Rotation and Symbol by $12.6%$ and $7.9%$ over the strongest baseline.
  arXiv  Detail & Related papers  (2026-09-11T07:41:20Z)
• Ultrafast and high resolution spatial light modulation for cold atoms [70.8440518934986]
  We develop and numerically validate a scheme for fully programmable Hubbard models, with time-dependent control over local chemical potentials, tunneling amplitudes, on-site interactions, and patterns of artificial magnetic flux.<n>The same architecture performs fast, arbitrary permutations of tweezers in 2D, decoupling optical constraints from the design of high-rate error-correcting codes.
  arXiv  Detail & Related papers  (2026-08-18T17:56:25Z)
• Two-Stage Deformable-Convolutional Inverse Design of Nanophotonic Absorbers from Optical Spectra [2.4149105714758545]
  Data-driven inverse design enables efficient generation of nanophotonic structures with prescribed optical responses.<n>This work presents a two-stage deformable-convolutional framework for reconstructing metal--insulator--metal resonator from 80-dimensional absorption spectra.
  arXiv  Detail & Related papers  (2026-08-12T09:47:06Z)
• Top-$k$ Pareto Bandits: Hypervolume Regret for Multi-Objective Slate Selection [48.83076933238825]
  We consider a multi-objective bandit problem where, at each round, the agent selects a slate of $k$ arms and observes their $d$-dimensional reward vectors under semi-bandit feedback.<n>We formalize this objective through the dominated hypervolume induced by the selected subset of arms, and define an $$-approximate hypervolume regret with respect to the best size-$k$ subset achievable in hindsight.<n>We establish a gap-free regret bound $tildeO(dsqrtnkT)$ that holds on every instance, together with a gap
  arXiv  Detail & Related papers  (2026-07-28T21:10:39Z)
• Mapping photon-number regimes in single-emitter lasers [41.99844472131922]
  We present a numerical analysis of an open quantum system consisting of an incoherently pumped three-level emitter strongly coupled to a single cavity mode.<n>We find that laser behavior can emerge from minimal photon populations.<n>Our findings can be applied to define the operational limits of single-emitter light sources.
  arXiv  Detail & Related papers  (2026-06-30T07:10:49Z)
• Flow Map Denoisers: Traversing the Distortion-Perception Plane for Inverse Problems [48.501415601682815]
  Image restoration faces a fundamental tradeoff: methods that minimize error produce blurry reconstructions, while those that maximize perceptual quality yield sharp but less faithful images.<n>We show that flow map models implicitly define a one- parameter family of denoisers that continuously spans the distortion perception frontier.<n>Within a Plug-and-Play solver, the same mechanism extends to general inverse problems, where it controls a tradeoff between perceptual alignment and data consistency.
  arXiv  Detail & Related papers  (2026-06-18T05:15:43Z)
• Spectral Edge Dynamics of Training Trajectories: Signal--Noise Geometry Across Scales [0.0]
  We show that transformer training trajectories evolve within only a few coherent directions.<n>In companion work, the same spectral geometry provides early-warning signals of grokking.
  arXiv  Detail & Related papers  (2026-03-14T04:46:05Z)
• Unsupervised Discovery of Intermediate Phase Order in the Frustrated $J_1$-$J_2$ Heisenberg Model via Prometheus Framework [0.0]
  We apply the Prometheus variational autoencoder framework to explore the $J_1$-$J$ phase diagram.<n>We identify the structure factor $S(,)$ and $S(,)$ as the dominant order parameters.<n>This work establishes a scalable pathway for applying machine learning to frustrated quantum systems.
  arXiv  Detail & Related papers  (2026-02-25T00:44:51Z)
• Achieving $10^{-5}$ level relative intensity crosstalk in optical holographic qubit addressing via a double-pass digital micromirror device [0.0]
  Holographic beam shaping is a powerful approach for generating individually addressable optical spots for controlling atomic qubits.<n>Here, we present an all-optical scheme that mitigates both effects using a single digital micromirror device.
  arXiv  Detail & Related papers  (2025-12-15T20:35:40Z)
• S2ML: Spatio-Spectral Mutual Learning for Depth Completion [56.26679539288063]
  Raw depth images captured by RGB-D cameras often suffer from incomplete depth values due to weak reflections, boundary shadows, and artifacts.<n>Existing methods address this problem through depth completion in the image domain, but they overlook the physical characteristics of raw depth images.<n>We propose a Spatio-Spectral Mutual Learning framework (S2ML) to harmonize the advantages of both spatial and frequency domains for depth completion.
  arXiv  Detail & Related papers  (2025-11-08T15:01:55Z)
• PFDepth: Heterogeneous Pinhole-Fisheye Joint Depth Estimation via Distortion-aware Gaussian-Splatted Volumetric Fusion [61.6340987158734]
  We present the first pinhole-fisheye framework for heterogeneous multi-view depth estimation, PFDepth.<n> PFDepth employs a unified architecture capable of processing arbitrary combinations of pinhole and fisheye cameras with varied intrinsics and extrinsics.<n>We show that PFDepth sets a state-of-the-art performance on KITTI-360 and RealHet datasets over current mainstream depth networks.
  arXiv  Detail & Related papers  (2025-09-30T09:38:59Z)
• HyperspectralMAE: The Hyperspectral Imagery Classification Model using Fourier-Encoded Dual-Branch Masked Autoencoder [0.04332259966721321]
  Hyperspectral imagery provides rich spectral detail but poses unique challenges because of its high dimensionality in both spatial and spectral domains.<n>We propose textitHyperspectralMAE, a Transformer-based model for hyperspectral data that employs a textitdual masking strategy.<n>HyperspectralMAE achieves state-of-the-art transfer-learning accuracy on Indian Pines, confirming that masked dual-dimensional pre-training yields robust spectral-spatial representations.
  arXiv  Detail & Related papers  (2025-05-09T01:16:42Z)
• Minimum optical depth multiport interferometers for approximating arbitrary unitary operations and pure states [37.69303106863453]
  We address the problem of, using multiport interferometers, approximating with a given infidelity any pure state preparation and any unitary operation.<n>By means of numerical calculations, we show that pure states, in any dimension $d$, can be prepared with infidelity.
  arXiv  Detail & Related papers  (2020-02-04T15:40:49Z)

This list is automatically generated from the titles and abstracts of the papers in this site.

This site does not guarantee the quality of this site (including all information) and is not responsible for any consequences.