Nitrogen Plasma Passivated Niobium Resonators for Superconducting Quantum Circuits

• URL: http://arxiv.org/abs/2201.01776v2
• Date: Fri, 18 Feb 2022 13:41:51 GMT
• Title: Nitrogen Plasma Passivated Niobium Resonators for Superconducting Quantum Circuits
• Authors: K. Zheng, D. Kowsari, N. J. Thobaben, X. Du, X. Song, S. Ran, E. A. Henriksen, D. S. Wisbey, and K. W. Murch
• Abstract summary: We show that nitrogen plasma treatment forms a niobium nitride layer at the metal-air interface which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping of nitrogen more than 5 nm into the surface and a suppressed oxygen presence. Cryogenic microwave characterization shows an average filling factor adjusted two-level-system loss tangent $rmFdelta_TLS$ of $(2.9pm0.5)cdot10-7$ for resonators with 3 $rmmu$m center strip and $(1.0pm0.3)cdot10-7
• Score: 0.0
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: Microwave loss in niobium metallic structures used for superconducting quantum circuits is limited by a native surface oxide layer formed over a timescale of minutes when exposed to an ambient environment. In this work, we show that nitrogen plasma treatment forms a niobium nitride layer at the metal-air interface which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping of nitrogen more than 5 nm into the surface and a suppressed oxygen presence. This passivation remains stable after aging for 15 days in an ambient environment. Cryogenic microwave characterization shows an average filling factor adjusted two-level-system loss tangent $\rm{F\delta_{TLS}}$ of $(2.9\pm0.5)\cdot10^{-7}$ for resonators with 3 $\rm{\mu}$m center strip and $(1.0\pm0.3)\cdot10^{-7}$ for 20 $\rm{\mu}$m center strip, exceeding the performance of unpassivated samples by a factor of four.

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