Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

• URL: http://arxiv.org/abs/2108.05354v2
• Date: Mon, 4 Oct 2021 14:26:31 GMT
• Title: Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators
• Authors: D. Kowsari, K. Zheng, J. T. Monroe, N. J. Thobaben, X. Du, P. M. Harrington, E. A. Henriksen, D. S. Wisbey, and K. W. Murch
• Abstract summary: Slow deposition yields films with a high superconducting transition temperature ($9.20 pm 0.06 rm K$) We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators. For a coplanar waveguide resonator gap of $2mu rm m$, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as $1.5 times 10-7$ with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the
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• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a residual resistivity ratio of $4.8$. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of $2~\mu \rm m$, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as $1.5 \times 10^{-7}$ with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium.

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