Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers

• URL: http://arxiv.org/abs/2606.10719v1
• Date: Tue, 09 Jun 2026 11:28:05 GMT
• Title: Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers
• Abstract summary: planar $$-Ta resonators fabricated on 300 mm ultra-high-resistivity intrinsic silicon using industrial processes.<n>Industrial MCZ silicon among the lowest-loss substrate platforms reported for superconducting resonators.
• Score: 0.0
• License: http://creativecommons.org/licenses/by-nc-nd/4.0/
• Abstract: Superconducting resonators are central to superconducting quantum information technologies and essential for bosonic qubit architectures, where long-lived storage modes enable hardware-efficient error correction. Achieving ultra-high quality factors in scalable planar circuits is challenging because multiple dissipation channels contribute to the total loss. Here we report planar $α$-Ta resonators fabricated on 300 mm ultra-high-resistivity ($>10$ k$Ω$ cm) intrinsic silicon using industrial processes, achieving median internal Q factors exceeding 40 million and maxima above 60 million. Energy-participation-ratio analysis identifies a dominant participation-controlled interface loss mechanism and places conservative upper bounds on substrate-associated dissipation. For the best-performing substrate, the inferred substrate loss tangent is below $1.0 \times 10^{-8}$, establishing industrial MCZ silicon among the lowest-loss substrate platforms reported for superconducting resonators. At the same time, the exceptionally low losses show no clear correlation with commonly cited silicon substrate metrics such as room-temperature resistivity or impurity concentrations. More broadly, these studies establish industrial 300 mm processing, careful interface engineering, and 300 mm MCZ silicon substrates as a promising platform for resonator-heavy superconducting quantum architectures with ultra-high quality factors.

Related papers

• Enhanced Tantalum Superconducting Resonator Performance via All-Surface Organic Monolayer Passivation [1.9627055996610963]
  Microwave measurements in the 5-9 GHz range reveal internal quality factors up to 1.8x106 in the single-photon regime at 100 mK.<n>These results demonstrate that molecular passivation effectively engineers low-loss interfaces and provides a scalable route toward high-coherence superconducting quantum devices.
  arXiv  Detail & Related papers  (2026-04-23T23:11:23Z)
• Loss Mechanisms in High-coherence Multimode Mechanical Resonators Coupled to Superconducting Circuits [34.554017586254346]
  High-overtone bulk acoustic-wave resonators (HBARs) are promising, since they have shown very high quality factors with negligible dephasing.<n>We study the acoustic dissipation of HBAR resonators in cQAD systems and find that the defect density of the piezoelectric material and its interface with the bulk are limiting factors for the coherence.
  arXiv  Detail & Related papers  (2026-02-25T17:04:50Z)
• Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications [0.0]
  parallel plate capacitors composed of aluminum-contacted, crystalline silicon fins are shown to be a promising technology for use in superconducting circuits. Single-crystal Si capacitors are incorporated in lumped element resonators and transmons by shunting them with lithographically patterned aluminum inductors and conventional $Al/AlO_x/Al$ Josephson junctions.
  arXiv  Detail & Related papers  (2024-08-02T16:24:22Z)
• Site-Controlled Purcell-Induced Bright Single Photon Emitters in Hexagonal Boron Nitride [62.170141783047974]
  Single photon emitters hosted in hexagonal boron nitride (hBN) are essential building blocks for quantum photonic technologies that operate at room temperature. We experimentally demonstrate large-area arrays of plasmonic nanoresonators for Purcell-induced site-controlled SPEs. Our results offer arrays of bright, heterogeneously integrated quantum light sources, paving the way for robust and scalable quantum information systems.
  arXiv  Detail & Related papers  (2024-05-03T23:02:30Z)
• High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices [0.0]
  Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. We report on superconducting CPW microwave resonators with internal quality factors exceeding 5x106 at high powers and 2x106 at low power. Josephson junction compatible CPW resonators fabrication process with both airbridges and silicon substrate etching is proposed.
  arXiv  Detail & Related papers  (2023-06-28T15:25:37Z)
• Improved Coherence in Optically-Defined Niobium Trilayer Junction Qubits [45.786749852292246]
  Niobium offers the benefit of increased operating temperatures and frequencies for superconducting devices. We revisit niobium trilayer junctions and fabricate all-niobium transmons using only optical lithography. We characterize devices in the microwave domain, measuring coherence times up to $62mu$s and an average qubit quality factor above $105$.
  arXiv  Detail & Related papers  (2023-06-09T13:26:13Z)
• Ternary Metal Oxide Substrates for Superconducting Circuits [65.60958948226929]
  Substrate material imperfections and surface losses are one of the major factors limiting superconducting quantum circuitry from reaching the scale and complexity required to build a practicable quantum computer. Here, we examine two ternary metal oxide materials, spinel (MgAl2O4) and lanthanum aluminate (LaAlO3), with a focus on surface and interface characterization and preparation.
  arXiv  Detail & Related papers  (2022-01-17T06:10:15Z)
• TOF-SIMS Analysis of Decoherence Sources in Nb Superconducting Resonators [48.7576911714538]
  Superconducting qubits have emerged as a potentially foundational platform technology. Material quality and interfacial structures continue to curb device performance. Two-level system defects in the thin film and adjacent regions introduce noise and dissipate electromagnetic energy.
  arXiv  Detail & Related papers  (2021-08-30T22:22:47Z)
• Measurement of the Low-temperature Loss Tangent of High-resistivity Silicon with a High Q-factor Superconducting Resonator [58.720142291102135]
  We present the direct loss tangent measurement of a high-resist intrinsicivity (100) silicon wafer in the temperature range from 70 mK to 1 K. The measurement was performed using a technique that takes advantage of a high quality factor superconducting niobium resonator.
  arXiv  Detail & Related papers  (2021-08-19T20:13:07Z)
• Quantum Sensors for Microscopic Tunneling Systems [58.720142291102135]
  tunneling Two-Level-Systems (TLS) are important for micro-fabricated quantum devices such as superconducting qubits. We present a method to characterize individual TLS in virtually arbitrary materials deposited as thin-films. Our approach opens avenues for quantum material spectroscopy to investigate the structure of tunneling defects.
  arXiv  Detail & Related papers  (2020-11-29T09:57:50Z)
• Materials loss measurements using superconducting microwave resonators [0.0]
  Superconducting microwave resonators provide a convenient qubit proxy for assessing performance. Superconducting microwave resonators provide a convenient qubit proxy for assessing performance.
  arXiv  Detail & Related papers  (2020-06-08T16:17:53Z)

This list is automatically generated from the titles and abstracts of the papers in this site.

This site does not guarantee the quality of this site (including all information) and is not responsible for any consequences.