Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

• URL: http://arxiv.org/abs/2112.07976v1
• Date: Wed, 15 Dec 2021 09:02:36 GMT
• Title: Laser-lithographically written micron-wide superconducting nanowire single-photon detectors
• Authors: Maximilian Protte, Varun B. Verma, Jan Philipp H\"opker, Richard P. Mirin, Sae Woo Nam, Tim J. Bartley
• Abstract summary: We demonstrate micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths from 0.59$mu$m to 1.43$mu$m under illumination at 1550nm.
• Score: 0.0
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths from 0.59$\mu$m to 1.43$\mu$m under illumination at 1550nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire width around 1$\mu$m.

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