Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms

• URL: http://arxiv.org/abs/2202.10303v1
• Date: Mon, 21 Feb 2022 15:28:06 GMT
• Title: Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms
• Authors: J. Verjauw, R. Acharya, J. Van Damme, Ts. Ivanov, D. Perez Lozano, F. A. Mohiyaddin, D. Wan, J. Jussot, A. M. Vadiraj, M. Mongillo, M. Heyns, I. Radu, B. Govoreanu, A. Poto\v{c}nik
• Abstract summary: We show that a subtractive etch process results in qubits with average qubit energy relaxation times T1 reaching 70 $mu$s, with maximum values exceeding 100 $mu$s. The presented fabrication process heralds an important milestone towards a manufacturable 300 mm CMOS process for high-coherence superconducting qubits.
• Score: 0.0
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: As the superconducting qubit platform matures towards ever-larger scales in the race towards a practical quantum computer, limitations due to qubit inhomogeneity through lack of process control become apparent. To benefit from the advanced process control in industry-scale CMOS fabrication facilities, different processing methods will be required. In particular, the double-angle evaporation and lift-off techniques used for current, state-of-the art superconducting qubits are generally incompatible with modern day manufacturable processes. Here, we demonstrate a fully CMOS compatible qubit fabrication method, and show results from overlap Josephson junction devices with long coherence and relaxation times, on par with the state-of-the-art. We experimentally verify that Argon milling - the critical step during junction fabrication - and a subtractive etch process nevertheless result in qubits with average qubit energy relaxation times T1 reaching 70 $\mu$s, with maximum values exceeding 100 $\mu$s. Furthermore, we show that our results are still limited by surface losses and not, crucially, by junction losses. The presented fabrication process therefore heralds an important milestone towards a manufacturable 300 mm CMOS process for high-coherence superconducting qubits and has the potential to advance the scaling of superconducting device architectures.

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