Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision

• URL: http://arxiv.org/abs/2203.09320v1
• Date: Thu, 17 Mar 2022 13:48:24 GMT
• Title: Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision
• Authors: Mengqi Wang, Haoyu Sun, Xiangyu Ye, Pei Yu, Hangyu Liu, Jingwei Zhou, Pengfei Wang, Fazhan Shi, Ya Wang and Jiangfeng Du
• Abstract summary: We propose a facile self-aligned patterning technique with the doping precision can reach 15nm. We demonstrate this technique by fabricating diamond nanopillar sensor arrays, which show high consistency and near-optimal photon counts. This technique should facilitate the development of parallel quantum sensing and scalable information processing.
• Score: 13.133647356160843
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: To efficiently align the creation of defect center with photonics structure in nanoscale precision is one of the outstanding challenges for realizing high-performance photonic devices and the application in quantum technology such as quantum sensing, scalable quantum systems, and quantum computing network. Here, we propose a facile self-aligned patterning technique wholly based on conventional engineering technology, with the doping precision can reach ~15nm. Specifically, we demonstrate this technique by fabricating diamond nanopillar sensor arrays, which show high consistency and near-optimal photon counts, high yield approaching the theoretical limit, and high filtering efficiency for different NV centers. Combined with appropriate crystal orientation, a saturated fluorescence rate of 4.65 Mcps and the best reported fluorescence-dependent detection sensitivity of 1900 cps^(-1/2) are achieved. This technique applicable to all similar solid-state systems should facilitate the development of parallel quantum sensing and scalable information processing.

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