Compact superconducting microwave resonators based on Al-AlOx-Al capacitor

• URL: http://arxiv.org/abs/2203.09592v2
• Date: Fri, 12 May 2023 12:40:37 GMT
• Title: Compact superconducting microwave resonators based on Al-AlOx-Al capacitor
• Authors: Julia Zotova, Rui Wang, Alexander Semenov, Yu Zhou, Ivan Khrapach, Akiyoshi Tomonaga, Oleg Astafiev and Jaw-Shen Tsai
• Abstract summary: resonators based on aluminum oxide -- aluminum ($mathrmAl/AlO_x/Al$) parallel-plate capacitors. The size of the resonators is only 0.04$mathrmmm2$, which is more than one order smaller than the typical size of coplanar resonators.
• Score: 56.00511651498414
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum -- aluminum oxide -- aluminum ($\mathrm{Al/AlO_x/Al}$) parallel-plate capacitors. The size of the resonators is only 0.04~$\mathrm{mm^2}$, which is more than one order smaller than the typical size of coplanar resonators (1~$\mathrm{mm^2}$). The fabrication method we developed easily fits into the standard superconducting qubits fabrication process. We have obtained capacitance per area 14~fF/$\mathrm{\mu m^2}$ and the internal quality factor $\mathrm{1\times 10^3 - 8\times 10^3}$ at the single-photon level. Our results show that such devices based on $\mathrm{Al/AlO_x/Al}$ capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as $0-\pi$ qubit.

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