Fabrication of Mode-Matched, Low-Loss Optical Resonators by Combination of FIB-Milling and CO$_2$ Laser Ablation

• URL: http://arxiv.org/abs/2501.09577v1
• Date: Thu, 16 Jan 2025 14:53:05 GMT
• Title: Fabrication of Mode-Matched, Low-Loss Optical Resonators by Combination of FIB-Milling and CO$_2$ Laser Ablation
• Authors: Patrick Maier, Simon Rupp, Niklas Lettner, Johannes Hecker Denschlag, Alexander Kubanek,
• Abstract summary: We present a novel fabrication technique for Fabry-Perot cavities using focused ion beam milling and CO$$ laser ablation.<n>The technique enables the customized and repeatable fabrication of low loss optics on a wide range of optical substrates.
• Score: 40.29001769050829
• License: http://creativecommons.org/licenses/by-nc-nd/4.0/
• Abstract: Fabry-Perot cavities are essential tools for applications like precision metrology, optomechanics and quantum technologies. A major challenge is the creation of microscopic spherical mirror structures which allow the precise matching with the wavefront of a Gaussian beam, while providing high surface quality. We present a novel fabrication technique, enabling the creation of customized microscopic Gaussian mode matched cavity mirror structures over a wide range of geometrical parameters, by combining focused ion beam milling (FIB) and CO$_2$ laser ablation. While FIB milling allows us to imprint features on the mirror substrate with a resolution on the nanometer scale, the application of defocused CO$_2$ laser pulses consistently reduces remaining surface deformations down to a roughness of $\sigma_\text{RMS}=0.2\,$nm. The average deviation of the profile from an ideal spherical shape is kept below a few nanometres. This technique enables the customized and repeatable fabrication of low loss optics on a wide range of optical substrates, including optical fibres. Thus, mode-matched Fabry-Perot cavities can be fabricated with pre-defined modal volume, high finesse and tailored ellipticity. Since the structural shape of the mirror is created by FIB milling, its pixel-by-pixel nature of the writing process can be used to create arbitrary structures with a resolution given by the FIB milling. At the same time, the surface quality is given by the CO$_2$ laser ablation processes, without degrading the FIB milled shape.

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