COMS-Integrated Atomic Vapor Cells with Ultra-long Optical Access for Highly Sensitive and Scalable Quantum Sensors

• URL: http://arxiv.org/abs/2507.05993v1
• Date: Tue, 08 Jul 2025 13:53:51 GMT
• Title: COMS-Integrated Atomic Vapor Cells with Ultra-long Optical Access for Highly Sensitive and Scalable Quantum Sensors
• Authors: Yintao Ma, Yao Chen, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Yang Lv, Libo Zhao,
• Abstract summary: We describe a micromachining paradigm for wafer-level atomic vapor cells functionalized by CMOS-compatible non-magnetic heaters and temperature sensors.<n>The integrated vapor cells achieved an ultra-long optical access of 5 mm, nearly four time that of previously microfabricated vapor cells.<n>Our achievements broaden the potential applications of microfabricated atomic vapor cells and pave the way for scalable manufacturing of ultrasensitive, chip-scale quantum sensors.
• Score: 6.798957182622441
• License: http://creativecommons.org/licenses/by/4.0/
• Abstract: The most appealing features of chip-scale quantum sensors are their capability to maintain extreme sensitivity while enabling large-scale batch manufacturing. This necessitates high-level integration and wafer-level fabrication of atomic vapor cells. In this paper, we describe a micromachining paradigm for wafer-level atomic vapor cells functionalized by CMOS-compatible non-magnetic heaters and temperature sensors and demonstrate several innovative applications. Leveraging standard micro-nanofabrication technology, the integrated vapor cells achieved an ultra-long optical access of 5 mm, nearly four time that of previously microfabricated vapor cells. The feasibility of the integrated atomic vapor cells fabrication process was verified by a consecutive 30-day aging test in a harsh environment (operating temperature of 473 K and vacuum of approximately 1 Pa). Benefiting from the ultra-long optical path, we observed several typical quantum effects, including the saturation absorption and spin fluctuations, a regime previously inaccessible with conventional micromachined vapor cells. Finally, a zero-field quantum magnetometry with an ultra-high magnetic sensitivity of 12 fT/Hz1/2 was also demonstrated. Our achievements broaden the potential applications of microfabricated atomic vapor cells and pave the way for scalable manufacturing of ultrasensitive, chip-scale quantum sensors.

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