A superinductor in a deep sub-micron integrated circuit

• URL: http://arxiv.org/abs/2507.13202v2
• Date: Thu, 07 Aug 2025 16:10:23 GMT
• Title: A superinductor in a deep sub-micron integrated circuit
• Authors: T. H. Swift, F. Olivieri, G. Aizpurua-Iraola, J. Kirkman, G. M. Noah, M. de Kruijf, F. E. von Horstig, A. Gomez-Saiz, J. J. L. Morton, M. F. Gonzalez-Zalba,
• Abstract summary: Superinductors are circuit elements characterised by an intrinsic impedance in excess of the superconducting resistance quantum.<n>We present a superinductor realised within a silicon integrated circuit (IC)<n>By interfacing the superinductor to a silicon quantum dot formed within the same IC, we demonstrate a radio-frequency single-electron transistor (rfSET)
• Score: 0.0
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: Superinductors are circuit elements characterised by an intrinsic impedance in excess of the superconducting resistance quantum ($R_\text{Q}\approx6.45~$k$\Omega$), with applications from metrology and sensing to quantum computing. However, they are typically obtained using exotic materials with high density inductance such as Josephson junctions, superconducting nanowires or twisted two-dimensional materials. Here, we present a superinductor realised within a silicon integrated circuit (IC), exploiting the high kinetic inductance ($\sim 1$~nH/$\square$) of TiN thin films native to the manufacturing process (22-nm FDSOI). By interfacing the superinductor to a silicon quantum dot formed within the same IC, we demonstrate a radio-frequency single-electron transistor (rfSET), the most widely used sensor in semiconductor-based quantum computers. The integrated nature of the rfSET reduces its parasitics which, together with the high impedance, yields a sensitivity improvement of more than two orders of magnitude over the state-of-the-art, combined with a 10,000-fold area reduction. Beyond providing the basis for dense arrays of integrated and high-performance qubit sensors, the realization of high-kinetic-inductance superconducting devices integrated within modern silicon ICs opens many opportunities, including kinetic-inductance detector arrays for astronomy and the study of metamaterials and quantum simulators based on 1D and 2D resonator arrays.

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