Niobium Titanium Nitride as a High Tensile Stress Material for Nanomechanics

• URL: http://arxiv.org/abs/2608.07127v1
• Date: Fri, 07 Aug 2026 11:39:59 GMT
• Title: Niobium Titanium Nitride as a High Tensile Stress Material for Nanomechanics
• Abstract summary: Superconducting nitrides stand out as particularly promising due to their high transition temperatures.<n>We report on the fabrication and characterization of highly stressed, doubly clamped niobium titanium nitride (NbTiN) nanostring resonators.
• Score: 0.13335436901594203
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: Over the past decades, high-coherence mechanical resonators have been continuously pushed to new limits, using techniques such as dissipation dilution and clamp-tapering to enhance their quality factor beyond intrinsic material limitations. Today, these mechanical resonators are often fabricated from silicon-nitride, silicon-carbide or aluminum. Recently, however, interest in novel material platforms has grown, especially those allowing for the integration within superconducting circuits. Among these, superconducting nitrides stand out as particularly promising due to their high transition temperatures compared to elementary superconductors. Here, we introduce them as nanomechanical resonators and report on the fabrication and characterization of highly stressed, doubly clamped niobium titanium nitride (NbTiN) nanostring resonators. Using optical interferometry, we determine the elastic properties and mechanical quality factor from room temperature to 13 K. We observe high tensile stress up to 0.81 GPa along with a Young's modulus of 181 GPa and an intrinsic mechanical quality factor up to 850. With these favorable mechanical properties, NbTiN constitutes a promising material platform for future applications in cavity electro- and nanomechanics.

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