Swept-Angle Synthetic Wavelength Interferometry
- URL: http://arxiv.org/abs/2205.10655v4
- Date: Wed, 29 Mar 2023 19:06:36 GMT
- Title: Swept-Angle Synthetic Wavelength Interferometry
- Authors: Alankar Kotwal and Anat Levin and Ioannis Gkioulekas
- Abstract summary: We present a new imaging technique, swept-angle synthetic wavelength interferometry, for full-field micron-scale 3D sensing.
Our technique uses light consisting of two narrowly-separated optical wavelengths, resulting in per-pixel interferometric measurements.
We build an experimental prototype, and use it to demonstrate these capabilities by scanning a variety of objects.
- Score: 22.706332189135242
- License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
- Abstract: We present a new imaging technique, swept-angle synthetic wavelength
interferometry, for full-field micron-scale 3D sensing. As in conventional
synthetic wavelength interferometry, our technique uses light consisting of two
narrowly-separated optical wavelengths, resulting in per-pixel interferometric
measurements whose phase encodes scene depth. Our technique additionally uses a
new type of light source that, by emulating spatially-incoherent illumination,
makes interferometric measurements insensitive to aberrations and (sub)surface
scattering, effects that corrupt phase measurements. The resulting technique
combines the robustness to such corruptions of scanning interferometric setups,
with the speed of full-field interferometric setups. Overall, our technique can
recover full-frame depth at a lateral and axial resolution of 5 microns, at
frame rates of 5 Hz, even under strong ambient light. We build an experimental
prototype, and use it to demonstrate these capabilities by scanning a variety
of objects, including objects representative of applications in inspection and
fabrication, and objects that contain challenging light scattering effects.
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