Related papers: Optimizing the growth conditions of Al mirrors for superconducting nanowire single-photon detectors

Optimizing the growth conditions of Al mirrors for superconducting nanowire single-photon detectors

URL: http://arxiv.org/abs/2305.17980v1
Date: Mon, 29 May 2023 09:39:24 GMT
Title: Optimizing the growth conditions of Al mirrors for superconducting nanowire single-photon detectors
Authors: R. Flaschmann, C. Schmid, L. Zugliani, S. Strohauer, F. Wietschorke, S. Grotowski, B. Jonas, M. M\"uller, M. Althammer, R. Gross, J.J. Finley, K. M\"uller
Abstract summary: We investigate the growth conditions for thin (less than 200 nm) sputtered aluminum (Al) films. We tune various sputtering parameters such as the deposition rate, temperature, and power. We confirm the high quality of the deposited films by realizing superconducting single-photon detectors integrated into multi-layer heterostructures.
Score: 0.0
License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
Abstract: We investigate the growth conditions for thin (less than 200 nm) sputtered aluminum (Al) films. These coatings are needed for various applications, e.g. for advanced manufacturing processes in the aerospace industry or for nanostructures for quantum devices. Obtaining high-quality films, with low roughness, requires precise optimization of the deposition process. To this end, we tune various sputtering parameters such as the deposition rate, temperature, and power, which enables 50 nm thin films with a root mean square (RMS) roughness of less than 1 nm and high reflectivity. Finally, we confirm the high quality of the deposited films by realizing superconducting single-photon detectors integrated into multi-layer heterostructures consisting of an aluminum mirror and a silicon dioxide dielectric spacer. We achieve an improvement in detection efficiency at 780 nm from 40 % to 70 % by this integration approach.

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