Erbium Quantum Memory Platform with Long Optical Coherence via Back-End of Line Deposition on Foundry-Fabricated Photonics

• URL: http://arxiv.org/abs/2506.17557v1
• Date: Sat, 21 Jun 2025 02:52:01 GMT
• Title: Erbium Quantum Memory Platform with Long Optical Coherence via Back-End of Line Deposition on Foundry-Fabricated Photonics
• Authors: Shobhit Gupta, Robert M. Pettit, Ananthesh Sundaresh, Vasileios Niaouris, Skylar Deckoff-Jones, Daniel P. Crowley, Lewis G. Carpenter, Alan M. Dibos, Manish Kumar Singh, Sean E. Sullivan,
• Abstract summary: This work demonstrates the monolithic integration of a quantum memory platform with low-loss foundry circuits via back-end-of-line deposition.<n>We deposited thin films of titanium dioxide ($mathrmTiO$) onto silicon nitride nanophotonic waveguides and studied Er optical coherence.<n>Results are comparable to state-of-the-art erbium devices.
• Score: 0.134821740580602
• License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/
• Abstract: Realizing scalable quantum interconnects necessitates the integration of solid-state quantum memories with foundry photonics processes. While prior photonic integration efforts have relied upon specialized, laboratory-scale fabrication techniques, this work demonstrates the monolithic integration of a quantum memory platform with low-loss foundry photonic circuits via back-end-of-line deposition. We deposited thin films of titanium dioxide ($\mathrm{TiO_2}$) doped with erbium (Er) onto silicon nitride nanophotonic waveguides and studied Er optical coherence at sub-Kelvin temperatures with photon echo techniques. We suppressed optical dephasing through ex-situ oxygen annealing and optimized measurement conditions, which yielded an optical coherence time of 64 $\mu$s (a 5 kHz homogeneous linewidth) and slow spectral diffusion of 27 kHz over 4 ms, results that are comparable to state-of-the-art erbium devices. Combined with second-long electron spin lifetimes and demonstrated electrical control of Er emission, our findings establish Er:$\mathrm{TiO_2}$ on foundry photonics as a manufacturable platform for ensemble and single-ion quantum memories.

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